AMI SpinSAM - Scanning - Acoustic - Microscopy

AMI SpinSAM - Scanning - Acoustic - Microscopy

  • Industry leading throughput on four 300mm wafer inspection
  • Best in class footprint / UPH
  • Leading defect capture and image quality
  • Modular design for ease of serviceability
  • Fully automated inspection and analysis with factory communication

 


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What If....


... there was a product, that understood the importance of Units Per Hour (UPH) - changing the game.

With a compact footprint, saving You expensive cleanroom space with industry leading throughput for Wafer Inspection and speed. It is able to scan 4 wafers simultanously with an innovative spinning scan method. It has proprietary Transducer technology and creates a complete wafer image without stitching. Easy to handle - the ultimate solution for accurately locating defects in a variety of Wafer applications.