WaferSense® Auto Gapping System 2™ (AGS2)
Improve Uniformity and Yield with the Wireless WaferSense AGS2 for Accurate and Repeatable Setups.
Product Video WaferSense® Auto Gapping System2™ (AGS2)
Overview
The Ideal Set-up
Achieve the ideal set-up for your equipment by measuring gaps at three points.
- Quickly achieve exactly the gap you need, using the chamber readings at process pressure in numerical and graphical form, with the easy-to-use Nordson Spectrum software.
- Achieve the best uniformity, whether you need to set a gap that is perfectly parallel
or slightly tilted.
Improve Tool-to-tool Process
Improve tool-to-tool process uniformity with objective and repeatable gap adjustments.
- Have peace of mind by taking the human variable out of adjusting your equipment.
- Make the right adjustments time after time.
- Enable anyone to set the same gap across the tools.
Reduce Equipment Calibration
Reduce time through live feedback.
- See the effects of adjustments in real-time.
- Have a clear indication when equipment settings are within tolerance using measurements that can be taken from inside an evacuated process chamber.
Speed Setups
Speed setups, maintenance and troubleshooting with automatic handling.
- Save time and expense.
Features & Software
| Preliminary Specifications | |
|---|---|
| Form factor | Available in 200mm and 300mm |
| Software | Nordson Spectrum |
| Accuracy | ± 0.025 mm for gaps up to 30mm |
| Housing material | Carbon Fiber |
| Resolution | <0.001 mm (for <30 mm gap) |
| Range | 8 to 30mm (Standard) , 7 to 50mm (Extended - exploratory) |
| Weight | 250 g (300mm) |
| Operating pressure | <10-6 to 760 torr |
| Temperature | 20 to 60 °C |
| Battery-duration | <3 hrs. per charge |
| Communication | Bluetooth |
| Operating system | Windows 10 |
| Product components | Gapping measurement device, charging clean case, carrying suitcase, USB communications link module and application software |
| Calibration | Factory recalibration recommended annually |
Displays real-time numerical and graphical data. Easily identify if it is above, below or within the target gap range. View log file data for review and analysis.
Test & Inspection News
Keep up to date with the latest news from Nordson Test & Inspection, including new product launches and press releases.
Nordson Test & Inspection Wins 2025 Mexico Technology Award for Industry-Leading MXI Solution
Minneapolis, Minnesota — September 2025 – Nordson Test & Inspection is proud to announce that it has been awarded a...
Read More Nordson Test & Inspection Wins 2025 Mexico Technology Award for Industry-Leading MXI SolutionNordson Test & Inspection Expands Partnership with Distributor smartTec Nordic A/S
Nordson Test & Inspection Expands Partnership with Distributor smartTec Nordic A/S Minneapolis, Minnesota — July 10,...
Read More Nordson Test & Inspection Expands Partnership with Distributor smartTec Nordic A/SAward Winning Acquisition Mode Dynamic Planar CT
Nordson Test & Inspection's new Dynamic Planar CT™ was recently recognized for it's superior software package for...
Read More Award Winning Acquisition Mode Dynamic Planar CTNordson Test & Inspection Receives Top Honor with Prime Step-by-Step Innovation Award for SQ3000M2 System
Minneapolis, Minnesota — November 12, 2024 — Nordson Test & Inspection today announced that it has earned the Prime...
Read More Nordson Test & Inspection Receives Top Honor with Prime Step-by-Step Innovation Award for SQ3000M2 SystemLatest on the Think Tank Blog
Learn more about Nordson Test & Inspection solutions, gain industry insight, and take a deep dive into new cutting-edge metrology equipment and inspection systems.