WaferSense® Auto Gapping System 2™ (AGS2)

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WaferSense® Auto Gapping System 2™ (AGS2)

Improve Uniformity and Yield with the Wireless WaferSense AGS2 for Accurate and Repeatable Setups.

Product Video WaferSense® Auto Gapping System2™ (AGS2)


Overview


The Ideal Set-up

Achieve the ideal set-up for your equipment  by measuring gaps at three points.

  • Quickly achieve exactly the gap you need, using the chamber readings at process pressure in numerical and graphical form, with the easy-to-use Nordson Spectrum software.
  • Achieve the best uniformity, whether you need to set a gap that is perfectly parallel  
    or slightly tilted.

Improve Tool-to-tool Process

Improve tool-to-tool process uniformity with objective and repeatable gap adjustments.

  • Have peace of mind by taking the human variable out of adjusting your equipment.
  • Make the right adjustments time after time.
  • Enable anyone to set the same  gap across the tools.

Reduce Equipment Calibration

Reduce time through live feedback.

  • See the effects of adjustments in real-time.
  • Have a clear indication when equipment settings are within tolerance using measurements that can be taken from inside an evacuated process chamber.

 Speed Setups

Speed setups, maintenance and troubleshooting with automatic handling.

  • Save time and expense.

Features & Software

Preliminary Specifications
Form factor Available in 200mm and 300mm
Software Nordson Spectrum
Accuracy ± 0.025 mm for gaps up to 30mm
Housing material Carbon Fiber
Resolution <0.001 mm (for <30 mm gap)
Range 8 to 30mm (Standard) , 7 to 50mm (Extended - exploratory)
Weight 250 g (300mm)
Operating pressure <10-6 to 760 torr
Temperature 20 to 60 °C
Battery-duration <3 hrs. per charge
Communication Bluetooth
Operating system Windows 10
Product components Gapping measurement device, charging clean case, carrying suitcase, USB communications link module and application software
Calibration Factory recalibration  recommended annually

Displays real-time numerical and graphical data. Easily identify if it is above, below or within the target gap range. View log file data for review and analysis.

 

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