Overview

Improve Yields

Improve yields and aids in predictive maintenance with accurate wafer handoff calibration.  

- Capture offset (XY and Z) data quickly for center transfer positions as the wafer-like ACS moves through your semiconductor equipment. 

- Improve the yield of your manufacturing process with properly calibrated equipment. 

Repeatable & Reproducible

Achieve repeatable and reproducible semiconductor equipment setups.

Eliminate technician-to-technician variation with the ACS calibration which enables repeatable and reproducible setup and maintenance checks.

Reduces Equipment Downtime

From hours to minutes.

- Save time troubleshooting as the wireless and vacuum compatible ACS allows equipment to remain sealed during inspection.
- Increase equipment availability while reducing manpower and consumable expense.

Speed Trouble-shooting

Speed trouble-shooting and lower consumable expense with visual inspection.

- Receive real-time images as robots move the ACS through the tool. NordsonSpectrum™ software graphical user interface provides x, y and z offsets that eliminate guesswork.
- Inspect gap between focus ring and ESC chuck.