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AMI SpinSAM Lite
Operator-Free Inspection and Analysis
The SpinSAM Lite automated inspection tool delivers high throughput and better sensitivity for accurately locating defects in wafer-based assemblies.
Successful applications include bonded wafers, Chip-on-Wafer, stacked wafers, MEMS, over-molded wafers and more. Efficiently spin scan up to 2 wafers simultaneously with matched transducers, wafers can be inspected over the widest frequency range ever achieved in a production environment.
Waterfall transducer provides non-immersion scanning which minimizes risks of contamination and false bond indications.