Overview

Speed equipment qualification with wireless measurements.

Collect and display particle data wirelessly using the APSR/RQ and CyberSpectrum™ software for real-time equipment diagnostics. Compare past to present as well as one tool to another with recorded particle data. Save time by swiftly locating contamination sources with the APSR/RQ data and see the effect of cleanings, adjustments and repairs in real time.

Shorten equipment maintenance cycles with reticle-like form factor.

Detect particles in real-time without opening the tool so you don’t need to expose process areas to the environment. APSR/RQ goes where reticles go to find the place where particles contaminate reticles. Once the location of particles is identified, tools may be selectively cleaned. Open only the dirty portion, keep the clean areas clean.

Lower equipment expenses with objective and reproducible data.

Raise your first-pass monitor reticle success, reduce your qualification expense and increase availability with APSR/RQ. Receive early warning for impending equipment failures and optimize your preventative maintenance plans. Establish a baseline from known clean tool, then cycle APSR/RQ through a candidate tool before committing monitor reticles.