News of Auto Centering System™ unveiled at Semicon Taiwan for the first time

This extension of the wireless, WaferSense® sensor portfolio is designed for capturing and analyzing real-time data for effective semiconductor tool set-up and maintenance. The wafer-shaped ACS “sees” inside equipment to capture dimensional offset data (x,y and z) to quickly center wafer transfer positions. We will also be showcasing our best-in-class portfolio of inspection and metrology systems and sensors for mid-end and back-end semiconductor.