Printed Circuit Board
Hard Disk Drive
Photovoltaic / Solar
Plasma Learning Center
The FlexTRAK is a highly configurable, high-throughput plasma system. Its universal architecture accommodates a multitude of material handling configurations to support a wide assortment of variable-size form factors.
The FlexTRAK-WF Plasma System is designed for high-throughput processing of semiconductor wafers (and other flat substrates) in sizes ranging from 3 in. to 200mm (8 in.) in diameter, for wafers held in open cassettes.
The FlexTRAK-WR Plasma System is designed for high-throughput processing of semiconductor wafers up to 300mm (12 in.) in diameter
Argon Plasma Cleaning of Fluorine, Organic and Oxide Contamination Using an Advanced Plasma Treatment System
Plasma Cleaning of Copper Leadframe with Ar and Ar/H2 Gases
Surface Preparation for Improved Adhesion
Controlled Chemical Plasma Etching for Advanced Technology Applications
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