Plasma can also functionalize which will enhance the performance of the device. The process of functionalization involves the reaction of plasma generated radicals with the sample surface resulting in the addition of specific chemical functionality to the material surface. For example, amino (NH2) functionality can be added to the surface by utilizing ammonia as a plasma process gas. Other chemistries can yield oxides, hydroxides, and carboxyl groups. Plasma can be used to remove coatings or process material build-up to restore the fit and function of the processing fixtures.