FlexTRAK-SH Plasma Treatment System

The universal architecture of the FlexTRAK-SH system accommodates a wide range of strip sizes in the same system, yielding unmatched production flexibility. Its small chamber volume and proprietary process control system provide short cycle times, with high machine autonomy.

The FlexTRAK-SH system is designed for high-throughput processing of lead-frame strips, laminate substrates, and other strip-type microelectronic components, up to 5 strips per cycle. The patented plasma chamber design provides exceptional uniformity and process repeatability. Its three axis symmetrical chamber ensures all areas of the strip are treated uniformly, while tight control over all process parameters ensures highly repeatable results.

HIGH-THROUGHPUT PROCESSING
The FlexTRAK-SH system’s integrated strip handling system provides rapid material transfer for a wide range of strip sizes, up to 5 strips per cycle. Processing can be done from most types of magazines and carriers. The patented chamber design and control architecture enable short plasma cycle times with very low overhead, ensuring that throughput is maximized and cost of ownership is minimized.

Related Solutions

Advanced Semiconductor Packaging & Assembly (ASPA)
Nordson MARCH manufactures manual, batch, & automated plasma treatment systems specifically designed for the advanced semiconductor packaging & assembly industry.

Learn More

BCB and UBM Adhesion
Plasma systems from Nordson MARCH can alter the topography and wettability of the wafer's original passivation layer to promote adhesion of polymers such as benzocyclobutene (BCB)

Learn More

Bump Adhesion
Plasma cleaning of the wafer surface using Nordson MARCH systems improves bump adhesion and has been demonstrated to increase bump shear strength dramatically.

Learn More

Cardiac Rhythm Management
Plasma technology from Nordson MARCH can be used in the manufacture of pacemakers and defibrillators to improve biocompatibility and bondability

Learn More

Descum
Plasma treatment technology from Nordson MARCH provides uniform removal of small quantities of resist over the entire surface of the wafer prior to further post processing

Learn More

Die Attach
Plasma systems from Nordson MARCH can clean substrates in order to improve the adhesion of die attach epoxy via surface activation. Plasma also removes oxidation from the metal surface

Learn More

Dielectric Patterning
In forming the redistribution layer, plasma processing with Nordson MARCH systems is a viable alternative for dielectric patterning where typical wet processing methods can be avoided

Learn More

Encapsulation and Molding
Nordson MARCH's plasma processing technology greatly improves adhesion of mold compounds by increasing the substrate surface energy, resulting in increased package reliability

Learn More

Image Sensor and LED Device Manufacturing
Applications of Nordson MARCH's plasma technology for image sensor device manufacturing include device cleaning, photoresist descum, stripping and etching, & bond strengthening

Learn More

Stripping and Etch
Plasma processing using Nordson MARCH systems is an efficient method for bulk stripping & etching of materials in wafer level packaging, MEMS manufacture, & disk drive processing

Learn More

Underfill
Using plasma treatment technology from Nordson MARCH prior to the underfill process increases underfill wicking speed, adhesion, fillet height & uniformity, and minimizes voiding

Learn More

Via Cleaning
Optimized plasma configurations from Nordson MARCH can effectively treat small vias without damaging the wafer surface

Learn More

Wafer Cleaning
Plasma removes fluorine, oxides, & metal contamination, significantly enhancing the yield, reliability, & performance of the integrated circuit

Learn More

Wafer Pre-Treatment (Redistribution)
Plasma removes contamination & oxidation, increasing reliability & bonding yields. It also improves adhesion between the wafer passivation layer & BCB

Learn More

Wire Bonding
Nordson MARCH's plasma processing technology optimizes the wire bonding process, which increases device reliability and minimizes manufacturing costs

Learn More

Related Products

AP-1000 Plasma Treatment SystemAP-1000 Plasma Treatment System

Nordson MARCH's AP-1000 has a PLC controller with touch screen interface that provides industrial reliability and easy use. It is designed to meet the rigorous demands of 24-hour operation in high-performance manufacturing environments.

FlexTRAK™ Plasma Treatment SystemFlexTRAK™ Plasma Treatment System

The FlexTRAK from Nordson MARCH offers high-throughput capability. Its small chamber volume and proprietary process control enable unmatched short cycle times, while its unique slim structure minimizes floor space requirements.

FlexTRAK-CD Plasma Treatment SystemFlexTRAK-CD Plasma Treatment System

The advanced design of Nordson MARCH's FlexTRAK-CD enables high throughbout plasma processing of lead frames and strips in a very compact chassis. The F3-type plasma chamber provides unmatched treatment uniformity and process repeatability.

FlexTRAK-2MB Plasma Treatment SystemFlexTRAK-2MB Plasma Treatment System

The new FlexTRAK-2MB plasma system from Nordson MARCH is designed for high throughput in-line plasma processing of semiconductor devices held in boats, trays, or other flat carriers, up to 2 boats per plasma cycle.

FlexTRAK-BH Plasma Treatment SystemFlexTRAK-BH Plasma Treatment System

FlexTRAK-BH from Nordson MARCH accommodates a wide range of boat sizes in the same system, yielding unmatched production flexibility. Its small chamber volume and proprietary process control system provide short cycle times, with high machine autonomy.

FlexTRAK-WR Plasma Treatment SystemFlexTRAK-WR Plasma Treatment System

FlexTRAK-WR from Nordson MARCH is an integrated semiconductor wafer handling system that provides rapid material transfer for a wide range of wafer sizes. Processing can be done from most type of wafer cassettes and front opening unified pods (FOUP).

XTRAK™ Plasma Treatment SystemXTRAK™ Plasma Treatment System

The patented XTRAK-IFP (Ion Free Plasma) System from Nordson MARCH is ideal for cleaning pre-programmed memory devices where UV light exposure is an issue. It enables only chemically active radicals to perform the work, eliminating ions & photons.

AP-600 and AP-300 Plasma Treatment SystemsAP-600 and AP-300 Plasma Treatment Systems

The AP-600 and AP-300 plasma systems' control module monitors and controls the vacuum and gas flow, chamber pressure, and power level. The easy-to-use interface provides automatic operation, is user-friendly, and ensures reproducible process conditions.

RIE-1701 Anisotropic RIE Plasma SystemRIE-1701 Anisotropic RIE Plasma System

The RIE-1701 Plasma System from Nordson MARCH is excellent for metal etching, sillicide etching, etching of III-V compounds, anisotropic etching of nitrides, oxides, and polyimides. It provides for chamber pressure control independent of process gas flow.

PM-100 Plasma Treatment SystemPM-100 Plasma Treatment System

Designed to provide the most efficient plasma processing with short cycle times, the PM-100 Plasma System from Nordson MARCH is ideal for laboratories, universities, and R&D facilities that are sensitive to the cost of capital equipment.

AP-1500 Plasma Treatment SystemAP-1500 Plasma Treatment System

The new AP-1500 plasma system from Nordson MARCH is an extra-large “batch”-type plasma system used to clean and treat electronic components, circuit boards, and medical & life science devices for a variety of assembly and packaging applications.

Quick Links

Life Science and Medical Devices
Products | Solutions

Printed Circuit Board
Products | Solutions

Semiconductor and Wafer
Products | Solutions

Support
Contact Us | Site Map | Technical Support

About
News | Events | Plasma Learning Center