FlexTRAK Series Plasma Treatment Systems

High-volume, automated plasma processing capabilities include SMEMA inline, island, magazine-to-magazine, pick-and-place robot, wafer transfer and custom material movement. These requirements are just some of the existing interface options of the plasma treatment systems, including the Nordson MARCH XTRAK and FlexTRAK platforms. The versatile, exceptionally uniform, compact chamber design allows for interchangeable processing configurations and plasma modes, including direct, RIE and patented IFP (ion free plasma) technologies.

Featured FlexTRAK Series

FlexTRAK-WF Plasma Treatment System

The FlexTRAK-WF Plasma System is designed for high-throughput processing of semiconductor wafers (and other flat substrates) in sizes ranging from 3 in. to 200mm (8 in.) in diameter, for wafers held in open cassettes.

FlexTRAK-SH Plasma Treatment System

Patented chamber design and control architecture of Nordson MARCH's FlexTRAK-SH enable short plasma cycle times with very low overhead, ensuring that throughput is maximized and cost of ownership is minimized.

XTRAK Plasma Treatment System

The patented XTRAK-IFP (Ion Free Plasma) System from Nordson MARCH is ideal for cleaning pre-programmed memory devices where UV light exposure is an issue. It enables only chemically active radicals to perform the work, eliminating ions & photons.

FlexTRAK-CD Plasma Treatment System

The advanced design of Nordson MARCH's FlexTRAK-CD enables high throughbout plasma processing of lead frames and strips in a very compact chassis. The F3-type plasma chamber provides unmatched treatment uniformity and process repeatability.

FlexTRAK-BH Plasma Treatment System

FlexTRAK-BH from Nordson MARCH accommodates a wide range of boat sizes in the same system, yielding unmatched production flexibility. Its small chamber volume and proprietary process control system provide short cycle times, with high machine autonomy.

FlexTRAK-2MB Plasma Treatment System

The new FlexTRAK-2MB plasma system from Nordson MARCH is designed for high throughput in-line plasma processing of semiconductor devices held in boats, trays, or other flat carriers, up to 2 boats per plasma cycle.

FlexTRAK Plasma Treatment System

The FlexTRAK from Nordson MARCH offers high-throughput capability. Its small chamber volume and proprietary process control enable unmatched short cycle times, while its unique slim structure minimizes floor space requirements.