TRAK Series Plasma Treatment Systems

Whether the substrate comes in an Auger boat, Jedec tray, magazine, specialize carrier, or by itself, one or more of the TRAK Series platforms are capable of plasma treating the product. TRAK Series Plasma Systems support manual and automated – inline or built-in handler – operations, SMEMA and SECS/GEM communications protocol, and remote user interface. The versatile, exceptionally uniform, compact chamber design allows for interchangeable processing configurations and plasma modes – direct, RIE, downstream, and IFP (ion-free plasma).

Featured TRAK Series

FlexTRAK-2MB Plasma Treatment System for Semiconductor and Wafer Applications
FlexTRAK-2MB Plasma Treatment System

The FlexTRAK-2MB plasma system is designed for high throughput, inline processing of microelectronic devices held in boats, trays or other carriers.

FasTRAK Plasma Treatment System

The FasTRAK™ Plasma System is a fully-automated, high-throughput, plasma treatment system for lead-frame strips, laminate substrates, and other strip-type microelectronic components.

FlexTRAK-CDS Plasma Treatment System
FlexTRAK-CDS Plasma Treatment System

The FlexTRAK-CDS plasma system is designed for high throughput processing of lead frame strips, laminated substrates, and other strip-type electronic components, up to 10 strips per plasma cycle.

FlexTRAK-CD Plasma Treatment System
FlexTRAK-CD Plasma Treatment System

The FlexTRAK-CD plasma system is designed for high throughput processing of lead frame strips and other strip-type electronic components, up to 5 strips per plasma cycle

FlexTRAK Plasma Treatment System for Semiconductor and Wafer Applications
FlexTRAK Plasma Treatment System

The FlexTRAK is a highly configurable, high-throughput plasma system. Its universal architecture accommodates a multitude of material handling configurations to support a wide assortment of variable-size form factors.