High-volume, automated plasma processing capabilities include SMEMA inline, island, magazine-to-magazine, pick-and-place robot, wafer transfer and custom material movement. These requirements are just some of the existing interface options of the plasma treatment systems, including the Nordson MARCH XTRAK and FlexTRAK platforms. The versatile, exceptionally uniform, compact chamber design allows for interchangeable processing configurations and plasma modes, including direct, RIE and patented IFP (ion free plasma) technologies.