Nordson MARCH Product Families

AP Series

AP Series
The AP-Series is a versatile line of batch plasma treatment systems consisting of four units offering small, mid-size and large vacuum chamber options that deliver process correlation, controller continuity and reliable, reproducible vacuum based gas plasma treatment to customers as they expand from an R&D environment to various levels of production. Based on the proven success of Nordson MARCH's established install base; best-in-class features including variable, removable, uniform electrode shelves, 13.56 MHz RF Generator with automatic matching network, reliable gas delivery with digital Mass Flow Controllers as a standard and easy user interface access are only some of the critical features to consider.

AP Series

TRAK Series

TRAK Series
Whether the substrate comes in an Auger boat, Jedec tray, magazine, specialize carrier, or by itself, one or more of the TRAK Series platforms are capable of plasma treating the product. TRAK Series Plasma Systems support manual and automated – inline or built-in handler – operations, SMEMA and SECS/GEM communications protocol, and remote user interface. The versatile, exceptionally uniform, compact chamber design allows for interchangeable processing configurations and plasma modes – direct, RIE, downstream, and IFP (ion-free plasma).

TRAK Series

SPHERE Series

SPHERE Series
Specifically designed for wafer processing, Nordson MARCH's SPHERE Series Plasma Systems are the ideal choice for wafer-level and 3D packaging applications. Solutions applicable to the SPHERE Series include descum, ashing (photoresist/polymer stripping), dielectric etch, wafer bumping, organic contamination removal, and wafer destress. Systems support automated handling and processing of round or square wafer/substrate sizes ranging from 75mm to 300mm. In addition, processing of thin wafer with or without carrier is possible, depending upon the wafer thickness.

SPHERE Series

VIA Series

VIA Series
Ideally suited for the Printed Circuit Board manufacturing requirements, Nordson MARCH’s unique approach of isolated, temperature controlled panel processing delivers superior etching capabilities for etch-back, desmear and surface activation of large flex or rigid panels of various sizes. Nordson MARCH’s large panel processing equipment can be configured with kHz or MHz RF Generation and is available in chamber sizes processing multiple panels from 4 ea. 18” x 24” up to 26 ea. 18” x 24” as a standard. Custom equipment configurations are available for large and thick panel requirements.

VIA Series

PCB Series

PCB Series
Designed with small-to-medium printed circuit board (PCB) manufacturers and research institutes in mind, Nordson MARCH’s PCB Series Plasma Systems deliver performance and flexibility at a low cost of ownership (CoO). Systems are configured with 4 or 8 plasma cells, which can process multiple panels ranging in sizes from 12” x 18” to 24” x 42”. Auto RF tuning and matching ensure process uniformity and repeatability for applications such as etch-back, desmear, and surface activation.

PCB Series

RIE Series

RIE Series
Uniform etch-rate and best-in-class value are the key features of Nordson MARCH’s Reactive Ion Etching tools. Micron-level removal, descum, surface roughening and traditional failure analysis can easily be accomplished with the industry leading hardware that bring sophisticated performance to the laboratory, R&D group or Wafer Level Packaging Fab. Nordson MARCH’s RIE equipment will accommodate a range of sizes including 75mm, 150 mm, 200 mm, 300 mm wafers or non-standard geometries. Equipment is offered with manual interface or automated robotic handling options.

RIE Series

Software

Software
Enhanced Software System Control enables remote system monitoring, data trending, statistical analysis and data file storage for regulatory documentation requirements as well as process validation. Options include specialty programs for single or multi-system control, SECS/GEM Interface, PLC data transfer, and remote system monitoring. Nordson MARCH software control packages are offered for use with the AP- Series, RIE-Series, FlexTRAK, XTRAK, and Legacy Products.

Software

Legacy

Legacy
Nordson MARCH offers industry leading plasma equipment technology and know-how based on more than 25 years in plasma manufacturing. Plasma processing equipment originally developed under the trade names of Advanced Plasma Systems and March Instruments allows for a full line of successful, mature product lines still in use. Nordson MARCH offers equipment technical support, spare parts, applications development and replacement options to our existing users of our legacy products including the PX-Series, CS-1701, C-Series, B-Series, R-Series.

Legacy