The new FlexTRAK-2MB plasma system is designed for high throughput in-line plasma processing of semiconductor devices held in boats, trays, or other flat carriers, up to 2 boats per plasma cycle. Multiple plasma process modules can be arranged in-line in order to meet the customer’s throughput requirements. The patented FlexTRAK™ plasma chamber provides exceptional uniformity and run-to-run process repeatability. The system is designed with a unique “pass-through” boat handling capability, which decreases buffering time and optimizes system productivity.
HIGH-THROUGHPUT PROCESSING
The new FlexTRAK-2MB plasma system’s boat handling system provides rapid material transfer for a wide range of boat sizes. Processing can be done with most types of boats, trays and flat carriers. The patented FlexTRAK™ chamber design and control architecture enable short plasma cycle times with very low overhead, ensuring that throughput is maximized and cost of ownership is minimized.