The AP-300 and AP-600 plasma systems from Nordson MARCH are designed to deliver exceptionally uniform plasma cleaning and treatment with unmatched ease of operation, reliability and low cost
Both models are completely self-contained, requiring minimal bench space. The system chassis houses the plasma chamber, control electronics, 13.56 MHz RF generator, and the automatic matching network (only the vacuum pump is external to the system). Maintenance access is provided through an interlocked door or removable panels.
The plasma chamber is constructed of high-quality aluminum with aluminum fixtures for superior durability. The plasma chamber supports up to 7 removable and adjustable powered or grounded shelves to accommodate a wide range of piece-parts, components, and part carriers including magazines, trays, and boats.
The AP-300 and AP-600 plasma system are suitable for a wide variety of plasma cleaning, surface activation and adhesion improvement applications. These capabilities are used for semiconductor manufacturing, microelectronic packaging and assembly, and by manufacturers of medical and life science devices.
The systems can accommodate a wide range of process gases including argon, oxygen, hydrogen, helium, and fluorinated gases. Both models come standard with two (2) electronic mass flow controllers for optimal gas control, with another two (2) available optionally (4 total max.).
Features and Benefits
- Touch screen control and graphical user interface give real-time process information
- Flexible shelf architecture allows processing of a wide variety of piece parts, components or carriers
- 13.56 MHz RF generator with automatic matching network delivers excellent process repeatability
- Convenient facility hook-ups for periodic calibration requirements used in validation processes