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Nordson MARCH Demonstrates Plasma System for Low-Cost, High Performance Wafer Processing at SEMICON Taiwan 2011

Visit Booth #531 to see the new FlexTRAK-WF Plasma System

06 Sep 2011


Concord, California, USA -  Nordson MARCH, a global leader in plasma processing technology, in cooperation with Premtek International, a premier sales and service distributor of semiconductor equipment, will be demonstrating the recently launched FlexTRAK-WF plasma treatment system - a low-cost, cassette-based automated plasma treatment system that handles five wafer sizes with minimal hardware change-over.

The FlexTRAK-WF offers an integrated robot and aligner that automate the processing of a wide variety of wafers and other flat substrates. The system offers high throughput, ranging up to 50 wafers per hour, while maintaining superior plasma uniformity for ashing, etching, and descum for wafer level packaging and general wafer-based processing applications.   

“We are excited to be offering the FlexTRAK-WF plasma system to the Taiwan market where there are multiple semiconductor industry applications that will benefit from the system’s flexibility” said Dr. James Getty, Vice President, Applications and Business Development, Nordson MARCH.

Joining Nordson MARCH and Premtek International in booth #531, will be Nordson ASYMTEK featuring precision dispensing solutions for flip-chip and LED applications. SEMICON Taiwan takes place at the Taipei World Trade Center from September 7th to September 9th, 2011. 

Photo available at: /en-us/divisions/march/PublishingImages/High-Res/FlexTRAK-WF-NordsonMarch-hires.jpg