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Ion-Free Plasma Processing for a Broader Range of Semiconductor Devices

2003 News

10 Nov 2003

Concord, CA, November 10, 2003 – Nordson MARCH introduces their patent-pending ion-free plasma treatment process. Downstream ion-free plasma enables the cleaning process to be safely used on an even broader range of semiconductor devices.

Advanced memory components with smaller geometries, such as stacked die and other pre-programmed devices, require increasingly smaller wirebonds. Cleanliness is extremely critical as wire contamination can prohibit proper bonding. However, conventional downstream plasma treatment can potentially cause EPROM erasure in such devices. Ion-free processing, in the absence of UV light, enables the cleaning process to be used safely and effectively.

Advanced memory devices may also require cleaning due to epoxy bleed-out. When epoxy is applied to microcircuit devices, a small amount of resin separates from the epoxy. The separated resin enters small crevices on the gold circuitry and spreads to the surrounding bond pads. Ion-free processing allows removal of the epoxy resin without exposure to the direct plasma glow discharge.

With ion-free processing, the ions, electrons and protons are removed, enabling the chemically active radicals and byproducts to perform the work using oxygen as the source gas. An ion-free plasma environment is one in which the part is exposed only to the chemical components of plasma.

Nordson MARCH's XTRAK-IFP system is configurable for either direct or ion-free plasma treatment. The system's modularity provides ultimate flexibility to match various manufacturing flow requirements, from high-speed, in-line to standalone configurations where one plasma station supports an island or group of equipment.

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About Nordson MARCH:

Nordson MARCH is the global leader in plasma processing technology for the printed circuit board (PCB), semiconductor, microelectronics, and medical & life science device manufacturing industries. Nordson MARCH has offices and applications laboratories worldwide, including California, Florida, Europe, Singapore, China, Japan, Korea and Taiwan. With over 20 years of continuous innovation, Nordson MARCH designs and manufactures a complete line of award-winning and patented plasma processing systems. An expert staff of scientists and engineers is available to assist in the development of plasma processes that improve both product reliability and increase production yields. Visit the Nordson MARCH web site for more details: www.nordsonmarch.com.

Nordson MARCH is a subsidiary of Nordson Corporation (NASDAQ: NDSN), the world's leading producer of precision dispensing and coating equipment.

For further information contact:

Nordson MARCH – World Headquarters
2470-A Bates Avenue
Concord, CA 94520-1122 U.S.A.
TEL: 1.925.246.1666
info@nordsonmarch.com
www.nordsonmarch.com