Introducing the FlexTRAK™ Plasma Treatment System

2003 News

25 Jul 2003

Concord, CA, July 25, 2003 – Nordson MARCH introduces the FlexTRAK™, the latest addition to their TRAK™ series of automated plasma systems. It is capable of both direct and downstream ion-free plasma processing for treating an even broader range of semiconductor devices. It is the only commercially available, high-throughput plasma system with flexible gas dynamics.

The FlexTRAK system is ideal for high-speed, in-line manufacturing operations and for standalone configurations, where one plasma station supports an island or group of equipment. The system's flexible architecture accommodates a variety of products from individual strips to magazine carriers for flip chips or chip scale packages. The FlexTRAK platform can be integrated with a wafer handling robot for treating wafers up to 300 mm in size, or configured with other magazine/strip handling equipment.

With throughput capability of 480 substrates/hour, the FlexTRAK system's small three-axis symmetrical chamber and proprietary process control provide unmatched treatment uniformity and short-cycle times. Multiple plasma modes allow unrestricted choice of any process gas.

Nordson MARCH's proprietary software offers an intuitive graphical interface for easy touch-screen programming. The FlexTRAK platform is both Internet- and Lan-ready, and real-time process representation allows statistical data gathering. The system easily integrates with most process equipment, including wirebond, die attach, dispense, mold and marking equipment. It is SMEMA compatible and SECS-GEM II compliant.

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About Nordson MARCH:

Nordson MARCH is the global leader in plasma processing technology for the printed circuit board (PCB), semiconductor, microelectronics, and medical & life science device manufacturing industries. Nordson MARCH has offices and applications laboratories worldwide, including California, Florida, Europe, Singapore, China, Japan, Korea and Taiwan. With over 20 years of continuous innovation, Nordson MARCH designs and manufactures a complete line of award-winning and patented plasma processing systems. An expert staff of scientists and engineers is available to assist in the development of plasma processes that improve both product reliability and increase production yields. Visit the Nordson MARCH web site for more details: www.nordsonmarch.com.

Nordson MARCH is a subsidiary of Nordson Corporation (NASDAQ: NDSN), the world's leading producer of precision dispensing and coating equipment.

For further information contact:

Nordson MARCH – World Headquarters
2470-A Bates Avenue
Concord, CA 94520-1122 U.S.A.
TEL: 1.925.246.1666
info@nordsonmarch.com
www.nordsonmarch.com