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FlexTRAK™ Plasma Treatment System with Flexible Handling Capability

2004 News

20 Jul 2004

Concord, CA, July 20, 2004 – The FlexTRAK™ system is a highly configurable, high-throughput plasma treatment system. It supports several handling configurations to accommodate a wide assortment of variable-size form factors. Configurations include magazine-to-magazine processing for single and multiple strips or lead frames, reel-to-reel, wafer processing, and standalone configuration for island-based production environments.

The FlexTRAK™ system is capable of direct, downstream and ion-free (patent pending) plasma processing for treating a wide range of semiconductor devices. Its universal architecture accommodates a variety of products from individual strips to magazine carriers for flip chips or chip scale packages. The FlexTRAK™ can be integrated with a wafer-handling robot for treating wafers up to 300 mm in size, or configured with other magazine/strip handling equipment.

With throughput capability of up to 800 strips/hour, the FlexTRAK™ system's small three-axis symmetrical chamber and proprietary process control provide unmatched treatment uniformity and short-cycle times.

Nordson MARCH's proprietary software offers an intuitive graphical interface for easy touch-screen programming. The FlexTRAK™ platform is both Internet- and LAN-ready, and real-time process representation allows statistical data gathering. The system easily integrates with most process equipment, including wire bond, die attach, dispense, mold and marking equipment. It is SMEMA compatible and SECS-GEM II compliant.

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About Nordson MARCH:

Nordson MARCH is the global leader in plasma processing technology for the printed circuit board (PCB), semiconductor, microelectronics, and medical & life science device manufacturing industries. Nordson MARCH has offices and applications laboratories worldwide, including California, Florida, Europe, Singapore, China, Japan, Korea and Taiwan. With over 20 years of continuous innovation, Nordson MARCH designs and manufactures a complete line of award-winning and patented plasma processing systems. An expert staff of scientists and engineers is available to assist in the development of plasma processes that improve both product reliability and increase production yields. Visit the Nordson MARCH web site for more details: www.nordsonmarch.com.

Nordson MARCH is a subsidiary of Nordson Corporation (NASDAQ: NDSN), the world's leading producer of precision dispensing and coating equipment.

For further information contact:

Nordson MARCH – World Headquarters
2470-A Bates Avenue
Concord, CA 94520-1122 U.S.A.
TEL: 1.925.246.1666
info@nordsonmarch.com
www.nordsonmarch.com