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Nordson MARCH Announces FlexTRAK-WR Plasma System for High-volume Semiconductor Wafer Processing

2005 News

14 Jul 2005

Concord, CA, July 14, 2005 – Based on the successful FlexTRAK™ platform, Nordson MARCH announces the release of FlexTRAK-WR for high-volume plasma processing of semiconductor wafers. FlexTRAK-WR is a high-throughput system designed to process semiconductor wafers up to 300 mm, loaded into multiple cassettes or Front Opening Universal Pods (FOUP).

“There is a rapidly growing market for advanced plasma processing of semiconductor wafers after final passivation but before traditional back-end processes,” said Peter Bierhuis, President of Nordson MARCH. “We are leveraging our market leadership and applications expertise in back-end plasma processing to this new space. FlexTRAK-WR brings our production-proven advanced plasma technology to high-volume semiconductor wafer processing with an attractive value proposition.“

FlexTRAK-WR is capable of direct, downstream or ion-free (patent-pending) plasma processing for a wide range of semiconductor applications. FlexTRAK-WR three-axis symmetrical chamber and proprietary process control provides unmatched process uniformity while minimizing cycle times.

Nordson MARCH's proprietary software offers an intuitive graphical user interface with easy touch-screen programming. FlexTRAK-WR is both Internet- and LAN-ready, and real-time process representation allows statistical data gathering. FlexTRAK-WR easily integrates with other process equipment and is SMEMA compatible.

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About Nordson MARCH:

Nordson MARCH is the global leader in plasma processing technology for the printed circuit board (PCB), semiconductor, microelectronics, and medical & life science device manufacturing industries. Nordson MARCH has offices and applications laboratories worldwide, including California, Florida, Europe, Singapore, China, Japan, Korea and Taiwan. With over 20 years of continuous innovation, Nordson MARCH designs and manufactures a complete line of award-winning and patented plasma processing systems. An expert staff of scientists and engineers is available to assist in the development of plasma processes that improve both product reliability and increase production yields. Visit the Nordson MARCH web site for more details: www.nordsonmarch.com.

Nordson MARCH is a subsidiary of Nordson Corporation (NASDAQ: NDSN), the world's leading producer of precision dispensing and coating equipment.

For further information contact:

Nordson MARCH – World Headquarters
2470-A Bates Avenue
Concord, CA 94520-1122 U.S.A.
TEL: 1.925.246.1666
info@nordsonmarch.com
www.nordsonmarch.com