Contact or intraocular lens manufacturing and coating operations are processes that can benefit from using plasma to clean the reusable fixture components. Contact lens plasma treatment is a common functionalization application where the lens surface is oxidized to create a hydrophilic lens surface that is resistant to protein deposition. The plasma process allows for improved comfort and longer wear. An additional example is the use of plasma to remove contamination from process carriers used in the manufacture of contact lenses. Plasma cleaning can permit rework or maintain multiple use fixtures and process components by eliminating build-up that may occur through repetitive use.