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FlexTRAK Plasma Treatment System

FlexTRAK Plasma Treatment System

The FlexTRAK™ is a highly configurable, high-throughput plasma system. Its universal architecture accommodates a multitude of material handling configurations to support a wide assortment of variable-size form factors.

Superior Plasma Process Quality and Automation in One System

The Nordson MARCH FlexTRAK series of gas plasma equipment provides unparalleled treatment uniformity and process consistency. A three-axis symmetrical chamber ensures all positions of the product are treated uniformly, while tight controls over all process parameters ensure repeatable results from product to product.

The FlexTRAK is a highly configurable, high-throughput plasma system. Its universal architecture accommodates a multitude of material handling configurations to support a wide assortment of variable-size form factors. Its small chamber volume and proprietary process control enable unmatched short cycle times, while its slim structure minimizes floor space requirements.

High-Throughput Processing Capability

The FlexTRAK system handles a wide variety of product form factors, including boats, carriers, Jedec/Auer® boats, strips, laminates and wafers. Depending on throughput and product form requirements, the system can be configured for magazine-to-magazine processing of single and multiple strips or lead frames, reel-to-reel, wafer processing, and standalone for island-based production environments.

SMART Tune™ Management System

The FlexTRAK’s SMART Tune management system provides closed-loop plasma control that optimizes the RF system and minimizes tuning time. The system automatically recycles to a plasma-ready state, compensating for changes in vacuum pressure, temperature and varied lot sizes. Maximum power to the chamber is achieved in seconds with a proprietary algorithm that constantly measures forward and reflective power inside the chamber.

Features and Benefits

  • Easily integrates with a variety of process equipment, including wire bond, die attach, dispense, mold and marking equipment 
  • Ultimate application flexibility for direct, downstream and ion-free (patent-pending) plasma which allows treatment without exposure to the direct plasma glow discharge 
  • A compact, three-axis symmetrical chamber and proprietary process control for unmatched process uniformity 
  • Industry-leading throughput capacity with short cycle times 
  • A unique, slim structure that requires minimal floor space, all service components are easily accessible from the front

Related Products

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The FlexTRAK-CD plasma system is designed for high throughput processing of lead frame strips and other strip-type electronic components, up to 5 strips per plasma cycle

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FlexTRAK-WF Plasma Treatment SystemFlexTRAK-WF Plasma Treatment System

The FlexTRAK-WF Plasma System is designed for high-throughput processing of semiconductor wafers (and other flat substrates) in sizes ranging from 3 in. to 200mm (8 in.) in diameter, for wafers held in open cassettes.

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The FasTRAK™ Plasma System is a fully-automated, high-throughput, plasma treatment system for lead-frame strips, laminate substrates, and other strip-type microelectronic components.